JPH0437268U - - Google Patents
Info
- Publication number
- JPH0437268U JPH0437268U JP7713190U JP7713190U JPH0437268U JP H0437268 U JPH0437268 U JP H0437268U JP 7713190 U JP7713190 U JP 7713190U JP 7713190 U JP7713190 U JP 7713190U JP H0437268 U JPH0437268 U JP H0437268U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- gas introduction
- reaction tube
- exhaust
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 238000010926 purge Methods 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims 2
- 230000003647 oxidation Effects 0.000 claims 2
- 238000007254 oxidation reaction Methods 0.000 claims 2
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7713190U JPH0437268U (en]) | 1990-07-19 | 1990-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7713190U JPH0437268U (en]) | 1990-07-19 | 1990-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0437268U true JPH0437268U (en]) | 1992-03-30 |
Family
ID=31619233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7713190U Pending JPH0437268U (en]) | 1990-07-19 | 1990-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437268U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020528491A (ja) * | 2017-06-21 | 2020-09-24 | ピコサン オーワイＰｉｃｏｓｕｎ Ｏｙ | 基板処理装置および方法 |
-
1990
- 1990-07-19 JP JP7713190U patent/JPH0437268U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020528491A (ja) * | 2017-06-21 | 2020-09-24 | ピコサン オーワイＰｉｃｏｓｕｎ Ｏｙ | 基板処理装置および方法 |
| US11505864B2 (en) | 2017-06-21 | 2022-11-22 | Picosun Oy | Adjustable fluid inlet assembly for a substrate processing apparatus and method |
| JP2023017951A (ja) * | 2017-06-21 | 2023-02-07 | ピコサン オーワイ | 基板処理装置および方法 |